All are equally great programs in my eyes. Unless location is a concern for you, I'd follow the money. That's not to say automatically go with Maryland. Take a couple of weeks to see if you receive an offer from the other universities. I've heard of funding coming through at the last minute before.
Do you mind if I ask when and how you heard from UNC? They're my top choice, and I'm waiting on pins and needs to hear back from them.