Disclaimer: As a Stanford CS PhD student, I'm going to be a bit biased. Plus I don't pay, so I can't fully appreciate your situation.
You may want to keep in mind a few points:
First, Stanford is about connections. Students here have unbelievable opportunities for internships and jobs in the area. The department actually has a handful of full time staff that maintain industry connections (the "Computer Forum"). They set up fancy job fairs and constantly spam us (BS, MS and PhD) with interviews, internship possibilities, etc. Not to mention, many Profs are either formally involved with companies here, or have strong connections. Having come from a state school well outside of Silicon Valley that offered near-zero job hunting help, this seems pretty amazing to me. Princeton may well have good connections too, but they're not exactly close to where the action is. In short, if your dream is to work for a company out here, Stanford could be a really nice in.
Second, in the Bay Area you could probably make $15k+ during the summer and another $7-8k per quarter if you get TA or RAships. It seems like a fair number of MS students do TAships and PhDs generally don't do any more than they have to, so you may be able to bank on that. In all, if you work summers and TA one quarter out of the year, you could offset the cost significantly.
As far as reputation goes, Princeton is way up there, so I wouldn't make a decision based on name alone, especially for a masters. If you have money to burn, or want to live in the Bay Area and make use of the industry ties here, then it might be worth the price. If that's not the case, then it's probably hard to argue for the $50-100k differential.
You'll have fantastic educational opportunities whatever school you choose, so don't sweat it too much.