Congratz to tchiman27 for the acceptances.
I just graduated from UIUC last december. And I would like to share you some insight about the school. It has decent programs and excellent faculties in both RF and IC fabrication field. Moreover, the current head of department, Prof Cangellaris is a very excellent professor in EM and RF field. I had been taught by him in EM class last december, and he taught us both the theory and the practical aspect of the course brilliantly.
I heard that there would be many big new projects in the RF field, though i'm not so sure about it.
Contacting the faculties in both schools will give you a lot more informations.
Good luck and congratz!.
offered: Stanford, Gatech, UIUC, Cornell (BME)
rejected: MIT, UCB
waiting: uMich (BME)
all Master degree