Right now, I will prefer Berkeley. I want to do something which is inbetween science and engineering. I think Berkeley is better than MIT in that respect (particularly, my program Applied Science and Technology). If I get Harvard, I think I will prefer Harvard. Harvard DEAS is very good for my research interest, infact better than Berkeley. Your decision can be different based on your RESEARCH INTEREST. I think if you want to work on devices, fabrication etc. just close your eyes and go to Stanford. There is no univ in the world to beat Stan in that area! (since, you are comparing Stan and Harvard, I made a wild guess). Let me know if I can help you in your decision making process!