apollobud

Actually, UMich has a particularly strong robotics/AI faculty. Ben Kuipers, John Laird, Edwin Olson, and Satinder Singh all do excellent AI research at Michigan (just to name a few). I had PhD offers from both Penn and UMich (also doing AI/robotics), and I strongly favored UMich. Just my $.02.

Good luck - either way you can't go wrong!

Almost in an identical situation, I have applied to mechanical programs with robotics concentration. CMU RI provides excellent opportunities in the field of robotics, I am sure you already know that. I know for a fact that MS Robotics has more research involved in the second year as compared to other programmes offered by Robotics Institute (think MSCV, MSHCI, MSRSD etc) having spoken to some graduate students there. Also for job/intern opportunities, atleast 200 people applying for same positions(you should have something unique to attract employer attention). A lot of people intern at the local startups, however they won't sponsor H1B visa in case you want to work there for a long time.
Having said that, MS Robotics is highly selective and is one of the best programme offered at CMU. Congratulations on your acceptance!

I am incredibly excited to have been offered admission at CMU and Univerisity of Michigan for both MS in Robotics.
My education background is BS in ME at Umich. I am an international student holding an F1 visa. I have many research experience in control. In my graduate school, I would like to incline my research interest towards control by using machine learning/ artificial intelligence. This means I would like to have some transition from ME towards CS, and this is also one of the reasons why I applied for the Robotics program.
After graduation, I don't know yet whether I want to continue for Ph.D. but I do know that I don't want a programming job. 
Some of my considerations (I do not care about the cost or funding issues):
Ranking (in terms of robotics, especially in the field of control or AI) Location: Pittsburgh vs Ann Arbor - Which one has more job/internship opportunities? Especially for a foreign student. Research opportunity Quality of graduate school I would like to thank you for any comments.
 

You need to carefully check what the terms of the unfunded PhD are at UCSD.  You should contact students at UCSD and ask them what kind of funding options are available.
1) Does UCSD offer a tuition waiver?  Even for a PhD without guaranteed funding, there should be a tuition waiver.
2) Are TA stipends easy to come by?  Are PhD students guaranteed a TA position, or is it basically guaranteed with a little bit of effort?
3) Have you been talking with professors in your department?  Are any willing, or interested in taking you on?  If it seems that several professors are interested in supporting you but are unwilling to commit until the year starts, you probably have a good chance at securing a position in one of their labs.
If you get positive answers to these questions, you should definitely go to UCSD.  The UC schools are great and a PhD (funded) is better than a masters in engineering by a lot.  You'll have a great time in UCSD, which I've heard is a very nice school to be at.
If you really have doubts about your ability to secure funding at the school, that's a big problem, and you should probably just do a masters in UW, provided that you are financially able to support yourself through the two years.
 

I had to make a similar decision in undergrad.
 
Ultimately, the decision falls on whether you want to go into academia/research or go into regular industry positions that can be done with an MS. Most people do pay for professional MS degrees, so the fact that it's unfunded isn't necessarily a deterrent unless you think you'd be unable to repay the loans post-grad school.
 
Personally, how I feel is this: if you KNOW that you want to go into academia/research/some kind of position that you will need a PhD for, then go to UCSD and do the PhD. If you know you want an industry job, and/or are unsure about what you want to do next, take the MS and then go work after it.